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1

Low-Loss Broadband Package Platform With Surface Passivation and TSV for Wafer-Level Packaging of RF-MEMS Devices

Bangtao Chen,, Sekhar, Vasarla Nagendra, Cheng Jin,, Ying Ying Lim,, Toh, Justin See, Fernando, Sanchitha, Sharma, Jaibir

Journal:

IEEE Transactions on Components Packaging and Manufacturing Technology

Year:

2013

Language:

english

File:

PDF, 1.79 MB

english, 2013

2

Improved cantilever profiles for sensor elements

Fernando, Sanchitha, Austin, Michael, Chaffey, Jason

Journal:

Journal of Physics D Applied Physics

Year:

2007

Language:

english

File:

PDF, 163 KB

english, 2007

3

Integration of AlN with molybdenum electrodes and sacrificial amorphous silicon release using XeF 2

Sharma, Jaibir, Fernando, Sanchitha, Tan, Wee Ming

Journal:

Journal of Micromechanics and Microengineering

Year:

2014

Language:

english

File:

PDF, 2.51 MB

english, 2014

4

SPIE Proceedings [SPIE Smart Materials, Nano-, and Micro-Smart Systems - Sydney, Australia (Sunday 12 December 2004)] Smart Structures, Devices, and Systems II - Maximising microcantilever response: an analytical approach using mathematical models

Fernando, Sanchitha N., Chaffey, J. P., Al-Sarawi, Said F.

Year:

2005

Language:

english

File:

PDF, 282 KB

english, 2005

5

[IEEE 2014 IEEE International Electron Devices Meeting (IEDM) - San Francisco, CA, USA (2014.12.15-2014.12.17)] 2014 IEEE International Electron Devices Meeting - A monolithic 9 degree of freedom (DOF) capacitive inertial MEMS platform

Ocak, Ilker E., Cheam, Daw D., Fernando, Sanchitha N., Lin, Angel T.H., Singh, Pushpapraj, Sharma, Jaibir, Chua, Geng L., Chen, Bangtao, Gu, Alex Y.D., Singh, Navab, Kwong, Dim-Lee

Year:

2014

Language:

english

File:

PDF, 1.47 MB

english, 2014

6

AlN Actuator for Tunable RFMEMS Capacitor

Fernando, Sanchitha, Min, Tang, Khine, Lynn, Agarwal, Rahul, Lau, Kia Hian, Soon, Jeffrey B.W., Tsai, Ming Lin Julius

Journal:

Advanced Materials Research

Year:

2011

Language:

english

File:

PDF, 1.11 MB

english, 2011